Cathodoluminescence Hyperspectral Imaging of Nitride Semiconductors: Introducing New Variables

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Cathodoluminescence Hyperspectral Imaging of Nitride Semiconductors: Introducing New Variables

Cathodoluminescence (CL) hyperspectral imaging—the acquisition of a full optical emission spectrum at each pixel of an image—has become firmly established as a measurement mode in scanning electron microscopy (SEM) [1]. CL is sensitive to the structural, compositional and electrical properties of a sample, and the inherent multimode nature of SEM makes it possible to combine CL with other techn...

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ژورنال

عنوان ژورنال: Microscopy and Microanalysis

سال: 2014

ISSN: 1431-9276,1435-8115

DOI: 10.1017/s1431927614006254